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Graphene CVD Furnace System

  • DETAILS

Mini graphene CVD equipment is specially designed for graphene production, with high precision mass flowmeter and thin film vacuum gauge. Once the solenoid valve is equipped with a combustible gas detection device, the safety can be ensured at the same time.

High precision mass flowmeter and film vacuum gauge.

Combustible gas detection device, linkage outlet solenoid valve.

Small size

Designed for graphene production


VoltageAC220V, 50Hz
Heating zonessingle:200mm
Flat-temperature zone100mm
Heating elementHeat resistant alloy wire
ThermocoupleType K
Working temperature≤1150℃
Heating rateRecommended ≤10℃/min
Control accuracy±1℃
Temperature controlAI-PID 30 process curve
Furnace materialHigh purity quartz
Furnace sizeφ50mm O.D x 450mm L
Vacuum pumpMechanical pump;  Pumping speed: 1.1L/s
Ultimate vacuum5Pa
Flow control range±1.5%
Volume of air mixing tank750mL
Gas path material304 stainless steel
Pipeline interface6.35mm joint


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