Mini graphene CVD equipment is specially designed for graphene production, with high precision mass flowmeter and thin film vacuum gauge. Once the solenoid valve is equipped with a combustible gas detection device, the safety can be ensured at the same time.
High precision mass flowmeter and film vacuum gauge.
Combustible gas detection device, linkage outlet solenoid valve.
Small size
Designed for graphene production
Voltage | AC220V, 50Hz |
Heating zones | single:200mm |
Flat-temperature zone | 100mm |
Heating element | Heat resistant alloy wire |
Thermocouple | Type K |
Working temperature | ≤1150℃ |
Heating rate | Recommended ≤10℃/min |
Control accuracy | ±1℃ |
Temperature control | AI-PID 30 process curve |
Furnace material | High purity quartz |
Furnace size | φ50mm O.D x 450mm L |
Vacuum pump | Mechanical pump; Pumping speed: 1.1L/s |
Ultimate vacuum | 5Pa |
Flow control range | ±1.5% |
Volume of air mixing tank | 750mL |
Gas path material | 304 stainless steel |
Pipeline interface | 6.35mm joint |