It is widely used in SEM sample preparation or metal coating test by two-stage sputtering. High temperature plasma sputtering process is adopted and the coating is not easy to be damaged. The small plasma sputtering instrument uses PLC control system, all touch screen operation, easy to learn to use. This type of instrument is also equipped with a rotating sample table, which can effectively improve the uniformity of the coating.
| Voltage | AC220V, 50Hz |
| Chamber material | High Purity Quartz |
| Chamber size | φ180mm X 210mm |
| Plasma sputtering target gun | 2 inchx2 |
| Cooling mode | Water cooling |
| Cover material | 304 stainless steel |
| Sample table | φ60mm;
adjustable in 60mm-100mm |
| Evaporation source | Tungsten basket/Tungsten boat |
| Thermocouple | Type B thermocouple, working temperature 200 ℃ ~ 1500 ℃ |
| Vacuum gauge | Resistance vacuum gauge |
